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1

Tuning of PID controllers based on gain and phase margin specifications

Weng Khuen Ho, Chang Chieh Hang, Lisheng S. Cao

Journal:

Year:

1995

Language:

english

File:

PDF, 614 KB

english, 1995

2

Optimum Placement of Phasor Measurement Units in Power Systems

Sun, Lu, Chen, Tengpeng, Chen, Xuebing, Ho, Weng Khuen, Ling, Keck-Voon, Tseng, King-Jet, Amaratunga, Gehan A. J.

Journal:

IEEE Transactions on Instrumentation and Measurement

Year:

2018

Language:

english

File:

PDF, 2.75 MB

english, 2018

3

Self-tuning PID control of a plant with under-damped response with specifications on gain and phase margins

Weng Khuen Ho,, Chang Chieh Hang,, Junhong Zhou,

Journal:

IEEE Transactions on Control Systems Technology

Year:

1997

Language:

english

File:

PDF, 228 KB

english, 1997

4

The intelligent alarm management system

Jun Liu, Khiang Wee Lim, Weng Khuen Ho, Kay Chen Tan, Srinivasan, R., Tay, A.

Journal:

Year:

2003

Language:

english

File:

PDF, 453 KB

english, 2003

5

Estimation of wafer warpage profile during thermal processing in microlithography

Tay, Arthur, Ho, Weng Khuen, Hu, Ni, Chen, Xiaoqi

Journal:

Review of Scientific Instruments

Year:

2005

Language:

english

File:

PDF, 767 KB

english, 2005

6

RTD Response Time Estimation in the Presence of Temperature Variations and Its Application to Semiconductor Manufacturing

Woei Wan Tan, Li, R.F.Y., Ai Poh Loh, Weng Khuen Ho

Journal:

IEEE Transactions on Instrumentation and Measurement

Year:

2008

Language:

english

File:

PDF, 598 KB

english, 2008

7

[IEEE International Symposium on Intelligent Control - Vancouver, BC, Canada (27-30 Oct. 2002)] Proceedings of the IEEE Internatinal Symposium on Intelligent Control - Run-to-run process control for chemical mechanical polishing in semiconductor manufacturing

Da, L., Kumar, V.G., Tay, A., Al Mamun, A., Weng Khuen Ho,, See, A., Chan, L.

Year:

2002

Language:

english

File:

PDF, 577 KB

english, 2002

8

SPIE Proceedings [SPIE Microelectronic and MEMS Technologies - Edinburgh, United Kingdom (Wednesday 30 May 2001)] Process and Equipment Control in Microelectronic Manufacturing II - Spatially programmable thermal processing module for 300-mm wafer processing

Tay, Arthur E., Lim, Khiang W., Loh, Ai Poh, Tan, Woei Wan, Ho, Weng Khuen, Huang, Anya, Jun, Fu, Fallon, Martin

Year:

2001

Language:

english

File:

PDF, 272 KB

english, 2001

9

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Metrology, Inspection, and Process Control for Microlithography XXII - CD uniformity control via real-time control of photoresist properties

Chen, Ming, Allgair, John A., Raymond, Christopher J., Fu, Jun, Ho, Weng Khuen, Tay, Arthur

Year:

2008

Language:

english

File:

PDF, 223 KB

english, 2008

10

A tracking cooling fan using geofence and camera-based indoor localization

Liu, Shuo, Yin, Le, Ho, Weng Khuen, Ling, Keck Voon, Schiavon, Stefano

Journal:

Building and Environment

Year:

2017

Language:

english

File:

PDF, 1.78 MB

english, 2017

11

Coordinate control of air movement for optimal thermal comfort

Liu, Shuo, Yin, Le, Schiavon, Stefano, Ho, Weng Khuen, Ling, Keck Voon

Journal:

Science and Technology for the Built Environment

Year:

2018

Language:

english

File:

PDF, 2.19 MB

english, 2018

12

Full Coverage of Optimal Phasor Measurement Unit Placement Solutions in Distribution Systems Using Integer Linear Programming

Chen, Xuebing, Sun, Lu, Chen, Tengpeng, Sun, Yuhao, Rusli,, Tseng, King Jet, Ling, Keck Voon, Ho, Weng Khuen, Amaratunga, Gehan A. J.

Journal:

Year:

2019

Language:

english

File:

PDF, 1006 KB

english, 2019

13

Control of photoresist film thickness: Iterative feedback tuning approach

Arthur Tay, Weng Khuen Ho, Jiewen Deng, Boon Keng Lok

Journal:

Computers & Chemical Engineering

Year:

2006

Language:

english

File:

PDF, 576 KB

english, 2006

14

On control of resist film uniformity in the microlithography process

Weng Khuen Ho, Arthur Tay, Lay Lay Lee, Charles D. Schaper

Journal:

Control Engineering Practice

Year:

2004

Language:

english

File:

PDF, 675 KB

english, 2004

15

Critical dimension and real-time temperature control for warped wafers

Weng Khuen Ho, Arthur Tay, Jun Fu, Ming Chen, Yong Feng

Journal:

Journal of Process Control

Year:

2008

Language:

english

File:

PDF, 318 KB

english, 2008

16

Editorial

S. Joe Qin, Weng Khuen Ho

Journal:

Journal of Process Control

Year:

2008

Language:

english

File:

PDF, 91 KB

english, 2008

17

Constraint feedforward control for thermal processing of quartz photomasks in microelectronics manufacturing

Arthur Tay, Weng Khuen Ho, Charles D. Schaper, Lay Lay Lee

Journal:

Journal of Process Control

Year:

2004

Language:

english

File:

PDF, 299 KB

english, 2004

18

In Situ Monitoring of Photoresist Thickness Uniformity of a Rotating Wafer in Lithography

Tay, A., Weng Khuen Ho, Xiaodong Wu, Xiaoqi Chen

Journal:

IEEE Transactions on Instrumentation and Measurement

Year:

2009

Language:

english

File:

PDF, 810 KB

english, 2009

19

The direct Nyquist array design of PID controllers

Weng Khuen Ho, Tong Heng Lee, Wen Xu, Zhou, J.R., Ee Beng Tay

Journal:

IEEE Transactions on Industrial Electronics

Year:

2000

Language:

english

File:

PDF, 285 KB

english, 2000

20

Influence Function Analysis of Parameter Estimation with Generalized t Distribution Noise Model

Ho, Weng Khuen, Vu, Hoang Dung, Ling, Keck Voon

Journal:

Industrial & Engineering Chemistry Research

Year:

2013

Language:

english

File:

PDF, 1.56 MB

english, 2013

21

Modeling and Real-Time Control of Multizone Thermal Processing System for Photoresist Processing

Tay, Arthur, Chua, Hui Tong, Yuheng, Wang, Geng, Yang, Khuen, Ho Weng

Journal:

Industrial & Engineering Chemistry Research

Year:

2013

Language:

english

File:

PDF, 2.26 MB

english, 2013

22

Optimal Feed-Forward Control for Multizone Baking in Microlithography

Ho, Weng Khuen, Tay, Arthur, Chen, Ming, Kiew, Choon Meng

Journal:

Industrial & Engineering Chemistry Research

Year:

2007

Language:

english

File:

PDF, 359 KB

english, 2007

23

Filtering of the ARMAX Process with Generalized t -Distribution Noise: The Influence Function Approach

Ho, Weng Khuen, Ling, Keck Voon, Vu, Hoang Dung, Wang, Xiaoqiong

Journal:

Industrial & Engineering Chemistry Research

Year:

2014

Language:

english

File:

PDF, 2.35 MB

english, 2014

24

Iterative Learning Approach Toward Closed-Loop Automatic Tuning of PID Controllers

Tan, Kok Kiong, Zhao, Shao, Chua, Kok Yong, Ho, Weng Khuen, Tan, Woei Wan

Journal:

Industrial & Engineering Chemistry Research

Year:

2006

Language:

english

File:

PDF, 252 KB

english, 2006

25

Integral-Square-Error Performance of Multiplexed Model Predictive Control

Ling, Keck Voon, Ho, Weng Khuen, Feng, Yong, Wu, Bingfang

Journal:

IEEE Transactions on Industrial Informatics

Year:

2011

Language:

english

File:

PDF, 683 KB

english, 2011

26

[IEEE 2006 International Symposium on Semiconductor Manufacturing (ISSM) - Tokyo, Japan (2006.09.25-2006.09.27)] 2006 IEEE International Symposium on Semiconductor Manufacturing - Real-time Monitoring of Photoresist Thickness Contour in Microlithography

Khuen, Ho Weng, Xiaoqi, Chen, Xiaodong, Wu, Tay, Arthur

Year:

2006

Language:

english

File:

PDF, 2.10 MB

english, 2006

27

[IEEE 2007 IEEE International Conference on Control Applications - Singapore (2007.10.1-2007.10.3)] 2007 IEEE International Conference on Control Applications - Real-time estimation and control of photoresist properties in microlithography

Wu, Xiaodong, Tay, Arthur, Ho, Weng Khuen, Tan, Kok Kiong

Year:

2007

Language:

english

File:

PDF, 807 KB

english, 2007

28

[IEEE The 17th Annual SEMI/IEEE ASMC 2006 Conference - Boston, MA (May 22-24, 2006)] The 17th Annual SEMI/IEEE ASMC 2006 Conference - Robust Real-Time Thin Film Thickness Estimation

Choon Meng Kiew,, Tay, A., Weng Khuen Ho,, Khiang Wee Lim,, Lee, J.H.

Year:

2006

Language:

english

File:

PDF, 676 KB

english, 2006

29

Real-Time Control of Photoresist Extinction Coefficient Uniformity in the Microlithography Process

Tay, Arthur, Ho, Weng Khuen, Wu, Xiaodong

Journal:

IEEE Transactions on Control Systems Technology

Year:

2007

Language:

english

File:

PDF, 754 KB

english, 2007

30

Minimum time control of conductive heating systems for microelectronics processing

Tay, A., Weng Khuen Ho,, Young Peng Poh,

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2001

Language:

english

File:

PDF, 92 KB

english, 2001

31

[IEEE IECON 2007 - 33rd Annual Conference of the IEEE Industrial Electronics Society - Taipei, Taiwan (2007.11.5-2007.11.8)] IECON 2007 - 33rd Annual Conference of the IEEE Industrial Electronics Society - Measurement Bias Detection, Identification and Elimination for Multi-Zone Thermal Processing in Semiconductor Manufacturing

Ho, Weng Khuen, Yan, Han, Romagnoli, Jose A., Ling, Keck Voon

Year:

2007

Language:

english

File:

PDF, 3.89 MB

english, 2007

32

Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates

Weng Khuen Ho,, Tay, A., Schaper, C.D.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2000

Language:

english

File:

PDF, 279 KB

english, 2000

33

Multi-Zone Thermal Processing in Semiconductor Manufacturing: Bias Estimation

Han Yan,, Weng Khuen Ho,, Keck Voon Ling,, Khiang Wee Lim,

Journal:

IEEE Transactions on Industrial Informatics

Year:

2010

Language:

english

File:

PDF, 1.17 MB

english, 2010

34

Fault Detection of Wafer Warpage

Ho, Weng Khuen, Yap, Christopher, Tay, Arthur, Chen, Wei, Zhou, Ying, Tan, Woei Wan, Chen, Ming

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2007

Language:

english

File:

PDF, 625 KB

english, 2007

35

Critical Dimension Uniformity Via Real-Time Photoresist Thickness Control

Weng Khuen Ho,, Tay, A., Ming Chen,, Jun Fu,, Haijing Lu,, Xuechuan Shan,

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2007

Language:

english

File:

PDF, 780 KB

english, 2007

36

Real-time predictive control of photoresist film thickness uniformity

Lay Lay Lee,, Schaper, C.D., Weng Khuen Ho,

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2002

Language:

english

File:

PDF, 179 KB

english, 2002

37

[IEEE 2012 24th Chinese Control and Decision Conference (CCDC) - Taiyuan, China (2012.05.23-2012.05.25)] 2012 24th Chinese Control and Decision Conference (CCDC) - Development of in-situ real-time CD monitoring and control system through PEB process

Yang, Geng, Tay, Arthur, Weng Khuen Ho,

Year:

2012

Language:

english

File:

PDF, 344 KB

english, 2012

38

[IEEE IECON'03. 29th Annual Conference of the IEEE Industrial Electronics Society (IEEE Cat. No.03CH37468) - Roanoke, VA, USA (Nov. 2-6, 2003)] IECON'03. 29th Annual Conference of the IEEE Industrial Electronics Society (IEEE Cat. No.03CH37468) - Warpage detection during baking of semiconductor substrate in microlithography

Weng Khuen Ho,, Tay, A., Khiang Wee Lim,, Ying Zhou,, Kai Yang,

Year:

2003

Language:

english

File:

PDF, 378 KB

english, 2003

39

Approach to Real-Time Spatial Control of Steady-State Wafer Temperature During Thermal Processing in Microlithography

Tay, Arthur, Ho, Weng Khuen, Hu, Ni

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2007

Language:

english

File:

PDF, 1.01 MB

english, 2007

40

[IEEE 2004 8th International Conference on Control, Automation, Robotics and Vision (ICARCV) - Kunming, China (6-9 Dec. 2004)] ICARCV 2004 8th Control, Automation, Robotics and Vision Conference, 2004. - Detection of wafer warpages during thermal processing in microlithography

Weng Khuen Ho,, Tay, A., Ying Zhou,, Kai Yang,, Ni Hu,

Year:

2004

Language:

english

File:

PDF, 1.11 MB

english, 2004

41

[IEEE 2005 IEEE Instrumentationand Measurement Technology - Ottawa, ON, Canada (16-19 May 2005)] 2005 IEEE Instrumentationand Measurement Technology Conference Proceedings - In Situ Measurement & Control of Photoresist Develpment in Microlithorgraphy

Choon Meng Kiew,, Tay, A., Weng Khuen Ho,, Khiang Wee Lim,, Ying Zhou,

Year:

2005

Language:

english

File:

PDF, 563 KB

english, 2005

42

[IEEE 2014 13th International Conference on Control Automation Robotics & Vision (ICARCV) - Singapore (2014.12.10-2014.12.12)] 2014 13th International Conference on Control Automation Robotics & Vision (ICARCV) - Improved indoor tracking based on generalized t-distribution noise model

Shuo, Liu, Le, Yin, Khuen, Ho Weng, Voon, Ling Keck

Year:

2014

Language:

english

File:

PDF, 276 KB

english, 2014

43

[IEEE IECON'01. 27th Annual Conference of the IEEE Industrial Electronics Society - Denver, CO, USA (29 Nov.-2 Dec. 2001)] IECON'01. 27th Annual Conference of the IEEE Industrial Electronics Society (Cat. No.37243) - Fault diagnosis using dynamic finite-state automaton models

Yun-Xia Xi,, Khiang-Wee Lim,, Weng-Khuen Ho,, Preisig, H.A.

Year:

2001

Language:

english

File:

PDF, 637 KB

english, 2001

44

[IEEE 28th Annual Conference of the IEEE Industrial Electronics Society - Sevilla, Spain (5-8 Nov. 2002)] IEEE 2002 28th Annual Conference of the Industrial Electronics Society. IECON 02 - Control and signal processing for photoresist processing in microlithography

Tay, A., Weng Khuen Ho,, Khiang Wee Lim,, Ai Poh Loh,, Woei Wan Tan,

Year:

2002

Language:

english

File:

PDF, 412 KB

english, 2002

45

[IEEE IECON'99. Conference Proceedings. 25th Annual Conference of the IEEE Industrial Electronics Society - San Jose, CA, USA (29 Nov.-3 Dec. 1999)] IECON'99. Conference Proceedings. 25th Annual Conference of the IEEE Industrial Electronics Society (Cat. No.99CH37029) - Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks

Weng Khuen Ho,, Tay, A., Schaper, C.D.

Year:

1999

Language:

english

File:

PDF, 558 KB

english, 1999

46

[IEEE 2000 TENCON Proceedings. Intelligent Systems and Technologies for the New Millennium - Kuala Lumpur, Malaysia (24-27 Sept. 2000)] 2000 TENCON Proceedings. Intelligent Systems and Technologies for the New Millennium (Cat. No.00CH37119) - Diagnosability of faults using finite-state automaton model

YunXia Xi,, Khiang-Wee Lim,, Weng-Khuen Ho,, Preisig, H.A.

Year:

2000

Language:

english

File:

PDF, 377 KB

english, 2000

47

[IEEE 30th Annual Conference of IEEE Industrial Electronics Society, 2004. IECON 2004 - Busan, South Korea (2-6 Nov. 2004)] 30th Annual Conference of IEEE Industrial Electronics Society, 2004. IECON 2004 - Temperature control and in-situ fault detection of wafer warpage

Weng Khuen Ho,, Yap, C., Tay, A., Wei Chen,, Khiang Wee Lim,

Year:

2004

Language:

english

File:

PDF, 973 KB

english, 2004

48

IN-SITU FAULT DETECTION OF WAFER WARPAGE IN LITHOGRAPHY

TAY, Arthur, Weng Khuen, HO, YAP, Christopher, WEI, Chen, TSAI, Kuen-Yu

Journal:

IFAC Proceedings Volumes

Year:

2005

Language:

english

File:

PDF, 662 KB

english, 2005

49

SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Advances in Resist Technology and Processing XXI - A novel wafer baking system using hot air streams

Wang, Lan, Sturtevant, John L., Chow, Siew Loong, Loh, Ai Poh, Gong, Zhi Ming, Tan, Woei Wan, Tay, Arthur E. B., Ho, Weng Khuen

Year:

2004

Language:

english

File:

PDF, 823 KB

english, 2004

50

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Metrology, Inspection, and Process Control for Microlithography XXI - Real-time spatial control of photoresist development rate

Tay, Arthur, Archie, Chas N., Ho, Weng-Khuen, Hu, Ni, Kiew, Choon-Meng, Tsai, Kuen-Yu

Year:

2007

Language:

english

File:

PDF, 248 KB

english, 2007

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